Research Area

Research Experience (19+ Years)
Master of Philosophy in Electronics (M.Phil.):Dissertation Title: "Design and Investigation of Some Active R filter configuration" (1992-94)
Doctor of Philosophy (Ph. D.) (1998-2003) Ph.D. Thesis: "FABRICATION OF PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM AND GROWTH OF THIN FILMS USING PECVD"

Hands on Research Experience:

  • In designing and commissioning of PEALD, PECVD Machines.
  • Deposition of high-k thin films like SiO2, HfO2, ZrO2, CeO2, Al2O3 SiON and SiN using PEALD, Thermal CVD & PECVD.
  • Gained expertise in the chemical treatment of Silicon wafers required prior to processing.
  • Hands on experience on Atomic Layer Deposition ( ALD) of High K Materials of very few nm thicknesses, at Materials and devices laboratory for Microelectronics i.e. MDM Lab at Agrate Brianza, Milan, Italy University of California Santa Barbara .

Current Research Interest:

  • Deposition of high-k dielectric thin film growth, Novel High-k / Metal Gate stacks, MOS capacitors formation and characterization, for advanced CMOS technology.
  • Low dielectric thin films, Aerogel, Xerogel thin films, MIS structures for ULSI technology.
  • Reliability issues of the novel materials and nano devices.
  • Synthesis and characterization of nano materials.


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